Vacuum Chamber Module
The vacuum chamber module is designed for laser welding small production series of packages under vacuum or shielded atmosphere.
As an effective alternative to a full-sized glovebox, the vacuum chamber module fits inside the NOVA-6. The module consists of a vacuum chamber, vacuum pump, safety overpressure valve, baseplate and piping.
The vacuum pump evacuates the chamber to a vacuum of a few mBar. In this vacuum, the laser can weld through the cover glass.
Optionally the operator can choose to flush the chamber (and the package) with a controlled atmosphere. After 2 to 3 repeat pumping and flushing actions, the device will have an atmosphere suitable for closing the package.
Key features Vacuum Chamber Module
- Low moisture and oxygen content
- Vacuum pump evacuates the chamber to a vacuum
- Laser welding through the cover glass
- Ideal for specialty and low-volume series
Specifications Vacuum Chamber Module
Inside dimensions | 172 mm diameter x 100 mm height |
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Material | Stainless steel and optical glass |
Specs pump | . |
Type | Dry pump |
Voltage | 110-230V +/- 10% |
Frequency | 50/60 Hz |
Power | 600W max. |
Operating temperature | 12 to 31°C |
Operating humidity | Max. 80% |
Absolute pressure | 38 mTorr (0,5 Mbar) |
Options | Pressure sensor, Oxygen sensor, Humidity sensor, Automatic pump and purge cycle, Electrical/ SW integration into the NOVA-6 |