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Vacuum Chamber Module

The vacuum chamber module is designed for laser welding small production series of packages under vacuum or shielded atmosphere.

As an effective alternative to a full-sized glovebox, the vacuum chamber module fits inside the NOVA-6. The module consists of a vacuum chamber, vacuum pump, safety overpressure valve, baseplate and piping.

The vacuum pump evacuates the chamber to a vacuum of a few mBar. In this vacuum, the laser can weld through the cover glass.

Optionally the operator can choose to flush the chamber (and the package) with a controlled atmosphere. After 2 to 3 repeat pumping and flushing actions, the device will have an atmosphere suitable for closing the package.

Key features Vacuum Chamber Module

  • Low moisture and oxygen content
  • Vacuum pump evacuates the chamber to a vacuum
  • Laser welding through the cover glass
  • Ideal for specialty and low-volume series
Inside dimensions 172 mm diameter x 100 mm height
Material Stainless steel and optical glass
Specs pump .
Type Dry pump
Voltage 110-230V +/- 10%
Frequency 50/60 Hz
Power 600W max.
Operating temperature 12 to 31°C
Operating humidity Max. 80%
Absolute pressure 38 mTorr (0,5 Mbar)
Options Pressure sensor, Oxygen sensor, Humidity sensor, Automatic pump and purge cycle, Electrical/ SW integration into the NOVA-6

Customized Solutions

Send your sample to one of our technology centers in Europe for an evaluation. We will then determine which solution meets your needs best. AMADA WELD TECH offers feasibility testing and application consulting.